These series machines are floor-standing high-precision single side polishing machines. It can be matched with copper plate, tin plate, glass plate, stainless steel plate, etc., and with different types of polishing slurry, suitable for high-precision polishing of various semiconductor materials.

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  • Cast iron body, high equipment stability

  • Optional hard rail hydraulic turning tool system

  • Polishing plate temperature monitoring function

  • Rotation and swing function of polishing head

Performance Parameter

Specification / model TSP-400 TSP-450
Polishing plate size 400mm 450mm
Ceramic plate size 139mm 159mm
Polishing head qty. 2 2
Polishing plate rotation 0~90 RPM 0~90 RPM
Polishing head rotation 0~60RPM 0~60RPM
Machine size 1350X1000X2100 mm 1350X1000X2100 mm
Machine weight 1180kg 1180kg
Hard rail hydraulic turning tool system Optional Optional
Corrosion resistant coating Optional Optional

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